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EERT 22095 Special Topics in Electrical/Electronic and Related Engineering Technologies
Clean Room Technology and Semiconductor Processes will provide you with hands-on experience in an actual clean room environment. Learn the basics of cleanroom operation and protocols, control and monitoring of humidity and temperature, HEPA filtration, air turbulence, contamination sources and prevention.
You will also learn about vacuum system maintenance and troubleshooting, deposition techniques, as well as photolithography and etching (dry and wet etch), other patterning and printing techniques. The technical learning will be complemented with instruction on teamwork, communication and other professional skills. [3 credits]
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