Facility Tools

Facility Tools

Characterization
  • J. A. Woollam Ellipsometer
  • Olympus BH2 UMA
  • Olympus MHL 100
Plasma Etch
  • Oxford Plasmalab 80 Plus
Liquid Crystal Cell Assembly

  • Fujioka Align Mate Machine

  • Camalot Dispenser

  • Fujioka Dry Spacer Sprayer

  • LC Tech VacFill

  • Villa Precision Scriber

  • Manual Scriber

  • UVOCS UV Ozone Cleaning Systems

  • TNP Laser Repair System

  • Asymtek A403 Dispneser

  • LCI Plate Aligner

  • Electrolite ELC 4000 UV

  • Fujioka Rub Machine

  • LC Tek Rub Dry Clean

  • Samco UV Ozone Cleaner

  • Zenith AZ LCD LC Filling

Lithography

  • Nissha Printer

  • Nikon NSR

  • NuArc UV Exposure System

Thermal Processing

  • Reynoldstech Hotplate

  • Brewer Spinner Hotplate

  • Nakan Printer Hot Plate

  • WVR Vacuum Oven

  • CoAdna Therma Pres

  • Blue M Electric Oven

  • Precision Convection Oven

  • Themolyne Hotplate

Thin Film Coating/Deposition

  • Brewer Ge 100 GX Spinner

  • Headway Spinner

  • GenVac E-bean Evaporator

  • Tektronix SiOx Evaporator

  • MRC

Wet Processing (Surface Chemistry)

  • Adams Analytical Centrifuge

  • Eurotherm Betta Tech Check

  • Pressure Cleaning System

  • General Solvent Hood

  • Acid and Base Hoods

 

Cleanroom Research and Prototyping Facility

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