Facility Tools

Post Processing and Metrology
  • J. A. Woollam Ellipsometer
  • Olympus BH2 UMA
  • Olympus MHL 100
Plasma Etch
  • Oxford Plasmalab 80 Plus
Liquid Crystal Device Assembly
  • Fujioka Dry Spacer Sprayer

  • LC Tech VacFill

  • Villa Precision Scriber

  • Manual Scriber

  • UVOCS UV Ozone Cleaning Systems

  • TNP Laser Repair System

  • Asymtek A403 Dispneser

  • Electrolite ELC 4000 UV

Lithography
  • Nissha Printer

Thermal Process
  • Reynoldstech Hotplate

  • WVR Vacuum Oven

  • Blue M Electric Oven

  • Precision Convection Oven

  • Themolyne Hotplate

Thin Film Coating/Deposition
  • Headway Spinner

  • GenVac E-bean Evaporator

  • MRC

Wet Process (Surface Chemistry)
  • General Solvent Hood

  • Acid and Base Hoods