Facility Tools

Lithography

• NuArc UV Exposure System
• Ebeam Lab 200
• Karl Suss Mask Aligner
• Quintel Mask Aligner
• Dimatix and Sonoplot Microprinters

Thermal Process

• Hotplates(Thermolyne, Reynolds Tech)
• WVR Vacuum Oven
• Blue M Electric Oven
• Precision Convection Oven
• Themolyne Hotplate

Thin Film Coating/Deposition

• CEE Spincoater (7")
• Headway Spinner
• Laurell Spincoaters
• Angstrom E Sputter Coater
• Temescal e-beam deposition
• Forge Nano Atomic Layer Deposition

Wet Process (Surface Chemistry)

• General Solvent Hood
• Acid and Base Hoods
• Ultrasonic Cleaners